Semiconductor Makers Improves Lithography Overlay Performance through Workflow Automation based Run-to-Run Control.
MINNETONKA, MINN. – Savigent Software, Inc., the Minnetonka-based company specializing in event-driven manufacturing operations management software, announced today that it has published a new case study focused on the application of workflow automation in semiconductor manufacturing for lithography overlay run-to-run control.
Run-to-run control provides manufacturers with the ability to automatically adjust equipment recipe settings “run-to-run” in an effort to minimize the variability of process performance. Equipment recipe settings are adjusted in advance of processing based on a set of contextually relevant data, such as measurements from similar products previously produced.
Jay Mellen, Savigent’s executive vice president of business development, remarked, “While the application and benefits of run-to-run control in semiconductor manufacturing are well documented, our solution, implementing run-to-run control as a workflow-based system, offers significant benefits over traditional approaches. Workflows are graphical representations of business processes that are executable. They are assembled using easy to understand elements of functionality. Workflow-based systems are more accessible to non-programmer domain experts and more flexible to meet changing business needs.”
Catalyst Workflow™ is a part of Savigent’s expanding Catalyst™ suite of software products. Specifically, Catalyst Workflow™ delivers a controlled system for workflow automation, providing manufacturers with guaranteed compliance, unparalleled traceability and rich manufacturing intelligence. Implementations of Catalyst Worflow™ have been completed for multiple customers in a variety of industries, including the food and beverage, contract manufacturing, semiconductor, aerospace and defense, and specialty chemical sectors.
The case study can be found on Savigent’s web site at http://savigent.com/casestudies/.
Founded in 1994, Savigent Software has pioneered a new class of event-driven manufacturing operations management software. The company currently serves manufacturers in a variety of industries including automotive, semiconductor, industrial, specialty chemical, consumer packaged goods, and aerospace and defense. Customers served by Savigent are seeking increased efficiencies, agile control of manufacturing assets, and improved process control and product quality. The company also serves OEMs and independent software vendors by providing value-added software solutions for their products. Its Catalyst™ suite of products provides solutions for workflow automation, manufacturing intelligence and systems integration.
More information about Savigent Software can be found at savigent.com. Follow us on Twitter at twitter.com/savigent. Read our Level3 blog at blog.savigent.com.